You want to characterize sensitive optical elements like mirrors or filters in the EUV spectral range?
Damage to the optics caused by particles and debris must be avoided?
The radiation source should be stable, precise and compact?
You want to characterize sensitive optical elements like mirrors or filters in the EUV spectral range?
Damage to the optics caused by particles and debris must be avoided?
The radiation source should be stable, precise and compact?