- At-wavelength characterization of EUV optical components, e.g. multilayer mirrors, masks, or filters
- Off-synchrotron calibration of EUV tools, e.g. spectrographs and energy monitors
- EUV imaging and microscopy with high lateral resolution
Applications
![](/images/LnF/EUV%20Metrology/Filter-EUV_1500x563px.jpg)